Measurement of buried undercut structures in microfluidic devices by laser fluorescent confocal microscopy
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چکیده
منابع مشابه
Measurement of buried undercut structures in microfluidic devices by laser fluorescent confocal microscopy.
Measuring buried, undercut microstructures is a challenging task in metrology. These structures are usually characterized by measuring their cross sections after physically cutting the samples. This method is destructive and the obtained information is incomplete. The distortion due to cutting also affects the measurement accuracy. In this paper, we first apply the laser fluorescent confocal mi...
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ژورنال
عنوان ژورنال: Applied Optics
سال: 2009
ISSN: 0003-6935,1539-4522
DOI: 10.1364/ao.48.006432